Linear Module/Stage
Update: 2017/11/10 View:
- Brand: DDon
- Type: Stack 60/90/120
Introduction
Vacuum Classes
|
Class Code |
Ambient Temperature (℃) |
Vacuum Class (Pa) |
Temperature Sensor |
|
NT-L1 |
-20…+85 |
- |
Optional |
|
NT-L2 |
-40…+85 |
- |
Optional |
|
NT-L3 |
-60…+85 |
10-1 |
Optional |
|
HT |
-20…+150 |
10-3 |
Optional |
|
SHT |
-20…+200 |
10-7 |
Optional |
|
LT |
-100…+40 |
10-7 |
Optional |
|
SLT |
-200…+40 |
10-7 |
Optional |
|
Lx*Hx* |
Customized |
Customized |
Optional |
*The customized L (low) temperature and H (high) temperature. Range from -200 to +200.
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